Semiconductor Metrology: Key Applications of Cold Cathode Technology in Vacuum Pressure Measurement
Semiconductor Metrology Series Cold cathode gauges, also known as Penning gauges, are used to measure vacuum pressure in a variety of applications, including semiconductor manufacturing. These gauges are necessary to maintain the vacuum conditions required in processes such as chemical vapor deposition (CVD), physical vapor deposition (PVD), and etching in semiconductor metrology. Accurate vacuum pressure …