Indispensable Tools in Semiconductor Manufacturing – Residual Gas Analyzers (RGAs) and Leak Detectors
Semiconductor Metrology Series – 3 Residual Gas Analyzers (RGAs) and leak detectors are indispensable tools in semiconductor manufacturing, where vacuum integrity and contamination control are essential for high-yield, high-performance device fabrication. Key Applications RGAs monitor the composition and concentration of residual gases within vacuum chambers. These analyzers are critical for detecting trace contaminants, monitoring outgassing, …